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LASER-INTERFEROMETRIC GAUGING PROBE, LM-SERIES
Design and Operation

Major Performance Features

Applications

Datasheet

DESIGN AND OPERATION
Our LM-Series laser-interferometric gauging probes are precision length-measurement instruments, the first of their kind to allow making contacting length measurements over ranges of 20 mm to 50 mm with nanometer precisions. Their compactly designed gauging probes and 8h6-diameter probe shafts are compatible with conventional length-measurement systems.

Their integral miniature interferometers convert motions of their motor-driven probe shafts into optical-interference signals that are transmitted by fiberoptic cables to their optoelectronic signal-processing and power-supply units for conversion into lengths and output to external devices.

Their frequency-stabilized He-Ne lasers, the light sources for their miniaturized interferometers, and their corrections for environmental influences on laser wavelength form the bases for their high metric precisions. System operation and display of measurement results may be via either an external display unit or a PC running the software package supplied.

SIOS Meßtechnik GmbH, Am Vogelherd 46, D-98693 Ilmenau Germany, Phone: +49(0)3677 - 64470, Fax: +49(0)3677 - 64478, email: info@sios.de