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MINIATURE RETROREFLECTOR INTERFEROMETER, MI-SERIES
Design and Operation

Major Performance Features

Applications

Datasheet






APPLICATIONS
  • Precision laser-interferometric length-measurement systems for incorporating into single-axis and multi-axis plane tables, microscope stages, machine tools, or positioning systems
  • Positioning single-axis and multi-axis translation stages
  • Calibrating machine tools and coordinatemeasuring machines
  • Angular measurements
  • Precision length measurement in research and development

SIOS Meßtechnik GmbH, Am Vogelherd 46, D-98693 Ilmenau Germany, Phone: +49(0)3677 - 64470, Fax: +49(0)3677 - 64478, email:info@sios.de