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| PRODUCTS |
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NANO POSITIONING AND NANO MEASURING MACHINE, NMM-1
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| Design
and Operation
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Major Performance Features
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Applications
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Datasheet
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MAJOR
PERFORMANCE FEATURES |
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Three dimensional coordinate positioning and measuring system of highest
accuracy
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Abbe Comparator principle employed in each of the three measuring axes
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Modes of operation:
1. as a dynamic positioning system
2. as a measuring system operating in either continuous-scan mode or single-step mode
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Control of NMM-1 employs a comfortable script language running on the host PC equipped with a USB-interface
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An optional contacting system acts as zero-indicator and is interchangeable.
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The probe sensors can be attached according to customer's requirements, e.g.
scanning tunnelling and scanning atomic force microscopes, autofocussing sensors,
capacitive or inductive sensing systems.
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SIOS Meßtechnik
GmbH, Am Vogelherd 46, D-98693 Ilmenau Germany, Phone: +49(0)3677 -
64470, Fax: +49(0)3677 - 64478, email:info@sios.de
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