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TRIPLE-BEAM PLANE-MIRROR INTERFEROMETER, SP-TR SERIES
Design and Operation

Major Performance Features

Applications

Datasheet







APPLICATIONS
  • Laser-interferometric measurements on guides and translation, microscope, and positioning stages

  • High-precision pitch and roll corrections during biaxial or multiaxial length measurements

  • Calibrating metrological equipment and machine tools

  • Differential measurements (dilatometry, materials testing)

  • Angular measurements over extended ranges 
    (> ± 2 arcmin; available on special order)




SIOS Meßtechnik GmbH, Am Vogelherd 46, D-98693 Ilmenau Germany, Phone: +49(0)3677 - 64470, Fax: +49(0)3677 - 64478, email:info@sios.de