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| PRODUCTS |
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| TRIPLE-BEAM
PLANE-MIRROR INTERFEROMETER, SP-TR SERIES
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| Design
and Operation
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Major
Performance Features
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Applications
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Datasheet
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DESIGN AND
OPERATION |
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Our triple-beam interferometers, which combine
three interferometers in a single unit and thus
allow making simultaneous, nanometer-precision,
triaxial, length measurements, are intended for
incorporation into customer-supplied systems.
Angles may be determined with high precisions
from the differences between pairs of length
measurements and the respective beam separations
involved. The dynamic ranges for pitch and roll
measurements are approximately two minutes of
arc.
A He‑Ne‑laser emitting an ultrastable
wavelength supplies all three interferometers in
order that all three length measurements will be
based on the same reference length. A single
fiberoptic lightguide conducts its
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output beam
to the interferometric sensor head. Motions of
the moving mirrors are converted into modulated
signals that are transmitted to the electronic
power-supply/ signal-processing unit.
The
He‑Ne‑laser, which is frequency
stabilized in cases where large displacements
are to be measured, along with corrections for
barometric-pressure and ambient-temperature
variations, form the basis for high metric
precisions. Operation of the electronic
power-supply/signal-processing unit and display
of measurement data employ a PC running the
associated software package.
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SIOS Meßtechnik GmbH, Am
Vogelherd 46, D-98693 Ilmenau Germany, Phone: +49(0)3677 - 64470, Fax:
+49(0)3677 - 64478, email:info@sios.de
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