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MINIATURE PLANE-MIRROR INTERFEROMETER, SP-SERIES

Design and Operation

Major Performance Features

Applications

Datasheet


DESIGN AND OPERATION

Our SP-Series plane-mirror miniature interferometers are designed for incorporation into customer-supplied systems and used for making precision length measurements. Their layout and operation may be readily adapted to suit specific applications.
Their miniaturized sensor heads allow using them as permanently installed metrological systems. Plane mirrors or other optical-quality reflecting surfaces may be employed as reflectors on their translating arms, and may be angularly misaligned by as much as several minutes of arc without adversely affecting their operation. 

Their laser light sources are coupled to their sensor heads by fiberoptic cables. Their miniature interferometers
convert translations of their plane mirrors along the optical axes of their probing beams into optical-interference signals that are transmitted to their optoelectronic signal-processing and power-supply units for conversion into lengths and output to external devices. System operation and display of measurement results may be via either 
an external display unit or a PC running an optional software package.

 

SIOS Meßtechnik GmbH, Am Vogelherd 46, D-98693 Ilmenau Germany, Phone: +49(0)3677 - 64470, Fax: +49(0)3677 - 64478, email:info@sios.de