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MINIATURE PLANE-MIRROR INTERFEROMETER, SP-SERIES
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Design and Operation
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Major Performance Features
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Applications
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Datasheet
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APPLICATIONS
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Precision laser-interferometric length measurements on plane tables,
microscope stages, positioning systems,
coordinate-measuring machines, or machine tools
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One-dimensional, two-dimensional, and
multi-dimensional coordinate measurements
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Two-dimensional coordinate measurements in a common plane
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Positioning single-axis and multi-axis translation stages
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Calibrating length-measurement instrumentation, such as inductive or capacitve
displacement transducers, micro-meter screws, glass reticles, metal rules, gauging
probes,
dial gauges, coordinate-measuring machines, or hardness testers
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Angular measurements
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Simultaneus length and angular measurements in. e.g., vacuum chambers
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Dilatometry
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Noncontacting surface profiling
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SIOS Meßtechnik
GmbH, Am Vogelherd 46, D-98693 Ilmenau Germany,Phone: +49(0)3677 -
64470, Fax: +49(0)3677 - 64478, email:info@sios.de
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