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MINIATURE PLANE-MIRROR INTERFEROMETER, SP-SERIES
Design and Operation

Major Performance Features

Applications

Datasheet









MAJOR PERFORMANCE FEATURES
  • Ultraprecise length-measurement systems
  • Employ a metrological technique that minimizes Abbé errors
  • Versatile metrological systems designed for incorporation into customer-supplied hardware, readily adaptable to suit customers' special needs
  • Fiberoptic-coupled sensor heads
  • Plane mirrors or reflecting surfaces on objects being measured may be employed as reflectors
  • Objects being measured may wander normal to reflector-translation axes over distances limited only by the dimensions of the reflectors employed
  • Cause no thermal interference
  • Employ He-Ne lasers with high frequency stabilities as light sources
  • Correct for effects of environmental influences on laser wavelength

SIOS Meßtechnik GmbH, Am Vogelherd 46, D-98693 Ilmenau Germany, Phone: +49(0)3677 - 64470, Fax: +49(0)3677 - 64478, email:info@sios.de