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| PRODUCTS |
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MINIATURE DOUBLE PLANE MIRROR INTERFEROMETER, SP-D SERIES
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Design and Operation
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Major Performance Features
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Applications
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Datasheet
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APPLIKATIONS |
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Making measurements on plane tables, microscope stages, positioning systems, coordinate-measuring machines, or machine tools.
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They also allow correcting for angular errors on dual-axis and multi-axis coordinate-measuring machines.
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Measuring linear displacements relative to reference points
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Deformation studies
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Calibrating length-measurement and angle-measurement instrumentation.
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Noncontacting surface profiling
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Measurements in vacuum chambers at pressures ³ 10-5 bar
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Measurements in UHV chambers
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Materials testing, e.g., dilatometry
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SIOS Meßtechnik
GmbH, Am Vogelherd 46, D-98693 Ilmenau Germany, Phone: +49(0)3677 -
64470, Fax: +49(0)3677 - 64478, email:info@sios.de
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