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MINIATURE DOUBLE PLANE MIRROR INTERFEROMETER, SP-D SERIES
Design and Operation

Major Performance Features

Applications

Datasheet

MAJOR PERFORMANCE FEATURES






  • Allow making ultraprecise simultaneous length and angular measurements.
  • Employ high-frequency-stability He-Ne-lasers as light sources.
  • Fiberoptic-coupled sensor heads
  • Small beam diameters
  • Allow employing virtually any reflective surface as their moving mirrors.
  • Their beam separations may be tailored to suit customers' special requirements.
  • Simple, easy, alignment and operation
  • Compensate for environmental shifts in laser wavelength.
  • Both measurement beams are supplied by a single light source, and thus have the same wavelength.

SIOS Meßtechnik GmbH, Am Vogelherd 46, D-98693 Ilmenau Germany, Phone: +49(0)3677 - 64470, Fax: +49(0)3677 - 64478, email:info@sios.de